F. Laermer: search on Z-Library

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1

MEMS at Bosch - Si plasma etch success story, history, applications, and products

Laermer, Franz, Urban, Andrea

Journal:

Plasma Processes and Polymers

Year:

2019

Language:

english

File:

PDF, 1.79 MB

english, 2019

2

Fusing MEMS technology with lab-on-chip: nanoliter-scale silicon microcavity arrays for digital DNA quantification and multiplex testing

Podbiel, Daniel, Laermer, Franz, Zengerle, Roland, Hoffmann, Jochen

Journal:

Microsystems & Nanoengineering

Year:

2020

File:

PDF, 2.64 MB

2020

3

[IEEE IEEE International Solid-State Sensors and Actuators Conference - Boston, MA, USA (8-12 June 2003)] TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) - Thin film encapsulation of acceleration sensors using polysilicon sacrificial layers

Stahl, H., Hoechst, A., Fischer, F., Metzger, L., Reichenbach, R., Laermer, F., Kronmueller, S., Breitschwerdt, K., Gunn, R., Watcham, S., Rusu, C., Witvrouw, A.

Year:

2003

Language:

english

File:

PDF, 567 KB

english, 2003

4

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II - Monocrystalline Si membranes for pressure sensors fabricated by a novel surface micromachining process using porous silicon

Artmann, Hans, Schaefer, Frank, Lammel, Gerhard, Armbruster, Simon, Benzel, Hubert, Schelling, Christoph, Weber, Heribert, Vossenberg, Heinz-Georg, Gampp, Ronald, Muchow, Joerg, Laermer, Franz, Finkbe

Year:

2003

Language:

english

File:

PDF, 599 KB

english, 2003

5

Comprehensive Microsystems || Dry Etching

Year:

2008

Language:

english

File:

PDF, 830 KB

english, 2008

6

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - Industrial applications for LIGA-fabricated micro heat exchangers

Kelly, Kevin W., Harris, Chad, Stephens, Lyndon S., Marques, Christophe, Foley, Dan, Helvajian, Henry, Janson, Siegfried W., Laermer, Franz

Year:

2001

Language:

english

File:

PDF, 1.23 MB

english, 2001

7

Femtosecond spectroscopy of excited-state proton transfer in 2-(2′-hydroxyphenyl)benzothiazole

F. Laermer, T. Elsaesser, W. Kaiser

Journal:

Chemical Physics Letters

Year:

1988

Language:

english

File:

PDF, 566 KB

english, 1988

8

Ultrashort vibronic and thermal relaxation of dye molecules after femtosecond ultraviolet excitation

F. Laermer, T. Elsaesser, W. Kaiser

Journal:

Chemical Physics Letters

Year:

1989

Language:

english

File:

PDF, 542 KB

english, 1989

9

Radiationless processes in antiaromatic molecules: The photophysics of s-indacene studied by ultrashort light pulses

R. Klann, R.J. Bäuerle, F. Laermer, T. Elsaesser, M. Niemeyer, W. Lüttke

Journal:

Chemical Physics Letters

Year:

1990

Language:

english

File:

PDF, 666 KB

english, 1990

10

Excited-state proton transfer in a benzotriazole photostabilizer investigated by femtosecond spectroscopy

M. Wiechmann, H. Port, F. Laermer, W. Frey, T. Elsaesser

Journal:

Chemical Physics Letters

Year:

1990

Language:

english

File:

PDF, 621 KB

english, 1990

11

Electron transfer in porphyrin—quinone cyclophanes studied on the pico- and femto-second time scale

W. Frey, R. Klann, F. Laermer, T. Elsaesser, E. Baumann, M. Futscher, H.A. Staab

Journal:

Chemical Physics Letters

Year:

1992

Language:

english

File:

PDF, 429 KB

english, 1992

12

Generation of femtosecond UV pulses by intracavity frequency doubling in a modelocked dye laser

F. Laermer, J. Dobler, T. Elsaesser

Journal:

Optics Communications

Year:

1988

Language:

english

File:

PDF, 341 KB

english, 1988

13

A novel process for the preparation of thick porous silicon layers with very high porosity

A. Feyh, F. Laermer, S. Kronmüller, W. Mokwa

Journal:

physica status solidi (a)

Year:

2005

Language:

english

File:

PDF, 145 KB

english, 2005

14

Challenges, developments and applications of silicon deep reactive ion etching

F. Laermer, A. Urban

Journal:

Microelectronic Engineering

Year:

2003

Language:

english

File:

PDF, 528 KB

english, 2003

15

Femtosecond spectroscopy of stimulated emission from highly excited dye molecules

Laermer, F., Israel, W., Elsaesser, T.

Journal:

Journal of the Optical Society of America B

Year:

1990

Language:

english

File:

PDF, 843 KB

english, 1990

16

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - Single-layer silicon-on-insulator MEMS gyroscope for wide dynamic range and harsh environment applications

Kranz, Michael S., Hudson, Tracy D., Ashley, Paul R., Ruffin, Paul B., Burgett, Sherrie J., Temmen, Mark, Tuck, Jerry, Helvajian, Henry, Janson, Siegfried W., Laermer, Franz

Year:

2001

Language:

english

File:

PDF, 2.40 MB

english, 2001

17

Handbook of Silicon Based MEMS Materials and Technologies || Deep Reactive Ion Etching

Year:

2010

Language:

english

File:

PDF, 3.04 MB

english, 2010

18

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - Fabrication and performance of d33-mode lead-zirconate-titanate (PZT) MEMS accelerometers

Yu, Han G., Wolf, Richard, Deng, Kan, Zou, Lichun, Tadigadapa, Srinivas, Troilier-McKinstry, Susan, Helvajian, Henry, Janson, Siegfried W., Laermer, Franz

Year:

2001

Language:

english

File:

PDF, 88 KB

english, 2001

19

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - A new capacitive type MEMS microphone

Leinenbach, Christina, van Teeffelen, Kathrin, Laermer, Franz, Seidel, Helmut

Year:

2010

Language:

english

File:

PDF, 540 KB

english, 2010

20

Alpha-Tocopherol (Vitamin E)--the Natural Antioxidant for Polyolefins

Laermer, S.F., Zambetti, P.F.

Journal:

Journal of Plastic Film and Sheeting

Year:

1992

Language:

english

File:

PDF, 652 KB

english, 1992

21

[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Milestones in deep reactive ion etching

Laermer, F., Urban, A.

Year:

2005

Language:

english

File:

PDF, 811 KB

english, 2005

22

[IEEE 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - Hyogo, Japan (2007.1.21-2007.1.25)] 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - A novel sacrificial layer technology based on highly selective etching of silicon-germanium in CLF3

Leinenbach, Christina, Seidel, Helmut, Fuchs, Tino, Kronmueller, Silvia, Laermer, Franz

Year:

2007

Language:

english

File:

PDF, 791 KB

english, 2007

23

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - Microengineered cold gas thruster system for a co-orbiting satellite assistant (COSA)

Huang, Adam, Hansen, William W., Janson, Siegfried W., Helvajian, Henry, Helvajian, Henry, Janson, Siegfried W., Laermer, Franz

Year:

2001

Language:

english

File:

PDF, 229 KB

english, 2001

24

Engineering World Health at Northwestern University“Students Making a Difference in Global Health”

Laermer, Emily, Shelden, Kelly

Journal:

Journal of the Association for Laboratory Automation

Year:

2010

Language:

english

File:

PDF, 186 KB

english, 2010

25

MEMS || Mechanical Microsensors

Year:

2006

Language:

english

File:

PDF, 3.06 MB

english, 2006

26

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - Simple wireless powering scheme for MEMS devices

Wu, Jie, Quinn, Victor, Bernstein, Gary H., Helvajian, Henry, Janson, Siegfried W., Laermer, Franz

Year:

2001

Language:

english

File:

PDF, 778 KB

english, 2001

27

Femtosecond studies of excited-state proton and deuterium transfer in benzothiazole compounds

Frey, Wilhelm, Laermer, Franz, Elsaesser, Thomas

Journal:

Journal of Physical Chemistry

Year:

1991

Language:

english

File:

PDF, 669 KB

english, 1991

28

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - Gryphon M3 system: integration of MEMS for flight control

Huang, Adam, Folk, Chris, Ho, Chih-Ming, Liu, Z., Chu, Wesley W., Xu, Yong, Tai, Yu-Chong, Helvajian, Henry, Janson, Siegfried W., Laermer, Franz

Year:

2001

Language:

english

File:

PDF, 468 KB

english, 2001

29

Handbook of Silicon Based MEMS Materials and Technologies || Deep Reactive Ion Etching

Year:

2015

Language:

english

File:

PDF, 2.51 MB

english, 2015

30

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - MEMS programs at DARPA

Tang, William C., Helvajian, Henry, Janson, Siegfried W., Laermer, Franz

Year:

2001

Language:

english

File:

PDF, 147 KB

english, 2001

31

Time-resolved spectroscopy on ultrafast proton transfer in 2-(2'-hydroxy-5'-methylphenyl)benzotriazole in liquid and polymer environments

Wiechmann, M., Port, H., Frey, W., Laermer, F., Elsaesser, T.

Journal:

Journal of Physical Chemistry

Year:

1991

Language:

english

File:

PDF, 803 KB

english, 1991

32

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - High-efficiency microscale power using a fuel processor and fuel cell

Holladay, Jamie, Jones, Evan O., Phelps, Max, Hu, Jianli, Helvajian, Henry, Janson, Siegfried W., Laermer, Franz

Year:

2001

Language:

english

File:

PDF, 236 KB

english, 2001

33

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - Novel MEMS devices and silicon micromachined components for high-frequency circuits

Katehi, Linda P., Helvajian, Henry, Janson, Siegfried W., Laermer, Franz

Year:

2001

Language:

english

File:

PDF, 417 KB

english, 2001

34

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - Magnetostatic straight edge resonators on micromachined silicon membrane

Sajin, George, Marcelli, Romolo, Helvajian, Henry, Janson, Siegfried W., Laermer, Franz

Year:

2001

Language:

english

File:

PDF, 77 KB

english, 2001

35

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - Laser micromachining for manufacturing MEMS devices

Gower, Malcolm C., Helvajian, Henry, Janson, Siegfried W., Laermer, Franz

Year:

2001

Language:

english

File:

PDF, 945 KB

english, 2001

36

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - Micro brands manufacturing by copper vapor laser

Nikontchouk, Mikhail, Polyakov, Igor V., Gorny, Sergey, Helvajian, Henry, Janson, Siegfried W., Laermer, Franz

Year:

2001

Language:

english

File:

PDF, 204 KB

english, 2001

37

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - MEMS safety switch for controlling critical software operations

Cooper, J. Arlin, Kidd, Marie-Elena C., Dalton, Larry J., Helvajian, Henry, Janson, Siegfried W., Laermer, Franz

Year:

2001

Language:

english

File:

PDF, 223 KB

english, 2001

38

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - Analysis of inertia forces influence on operation voltage of electrostatic microrelays

Efremov, Georgy I., Mukhurov, Nikolay I., Helvajian, Henry, Janson, Siegfried W., Laermer, Franz

Year:

2001

Language:

english

File:

PDF, 102 KB

english, 2001

39

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - Modeling of rf MEMS switches

Robertson, Barbara, Ho, Fat D., Hudson, Tracy D., Helvajian, Henry, Janson, Siegfried W., Laermer, Franz

Year:

2001

Language:

english

File:

PDF, 980 KB

english, 2001

40

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - MEMS multisensor system for flight testing

Tanielian, Minas H., Helvajian, Henry, Janson, Siegfried W., Laermer, Franz

Year:

2001

Language:

english

File:

PDF, 1.60 MB

english, 2001

41

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - Micromachined pressure gauge for the vacuum range based on damping of a resonator

Kurth, Steffen, Hiller, Karla, Zichner, Norbert, Mehner, Jan, Iwert, Thomas, Biehl, Steffen, Doetzel, Wolfram, Gessner, Thomas, Helvajian, Henry, Janson, Siegfried W., Laermer, Franz

Year:

2001

Language:

english

File:

PDF, 604 KB

english, 2001

42

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - Single-crystal silicon triple-torsional micro-oscillators for use in magnetic resonance force microscopy

Chabot, Michelle D., Messina, Troy C., Mancevski, Vladimir, Miller, Casey W., Markert, John T., Helvajian, Henry, Janson, Siegfried W., Laermer, Franz

Year:

2001

Language:

english

File:

PDF, 829 KB

english, 2001

43

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - MEMS antennas for millimeter-wave applications

Neculoiu, Dan, Pons, Patrick, Plana, Robert, Blondy, Pierre, Mueller, Alexandru, Vasilache, Dan, Helvajian, Henry, Janson, Siegfried W., Laermer, Franz

Year:

2001

Language:

english

File:

PDF, 662 KB

english, 2001

44

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - Piezoelectric aluminum nitride thin films for ultrasonic transducers

Valbin, Laurie, Sevely, Laure, Helvajian, Henry, Janson, Siegfried W., Laermer, Franz

Year:

2001

Language:

english

File:

PDF, 189 KB

english, 2001

45

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - Optimization, simulation, and fabrication of a microgyroscope

Li, Shifeng, Chen, Shaochen, Helvajian, Henry, Janson, Siegfried W., Laermer, Franz

Year:

2001

Language:

english

File:

PDF, 386 KB

english, 2001

46

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - Large-displacement microactuators in deep reactive ion-etched single-crystal silicon

Smith, Gabriel L., Maloney, John M., Fan, Lawrence, DeVoe, Don L., Helvajian, Henry, Janson, Siegfried W., Laermer, Franz

Year:

2001

Language:

english

File:

PDF, 295 KB

english, 2001

47

'Phosphite-Free' Stabilization of Polyolefins

Young, Sai S., Laermer, Stuart F., Zambetti, Peter F.

Journal:

Journal of Plastic Film and Sheeting

Year:

1995

File:

PDF, 961 KB

1995

48

Reference Module in Materials Science and Materials Engineering || Dry Etching

Year:

2016

Language:

english

File:

PDF, 1.29 MB

english, 2016

49

[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Belfast (2018.1.21-2018.1.25)] 2018 IEEE Micro Electro Mechanical Systems (MEMS) - MEMS at Bosch — Invented for life

Year:

2018

Language:

english

File:

PDF, 1.37 MB

english, 2018

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